MKS ASTeX MicroWave SmartPower Generator

Brand: MKS ASTeX USA
Model: MicroWave SmartPower
MKS P/N: FI20110
Rev: L, D/C: 1431

Specs: 208V, 3 Phase, 60A, 50/60Hz
Cert: CE, ETL Listed
Made: Assembled in USA

Application: Semiconductor Plasma, CVD, Etching, Surface Treatment
Function: 2.45GHz Microwave Plasma Generator