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MKS ASTeX MicroWave SmartPower Generator
Brand: MKS ASTeX USA
Model: MicroWave SmartPower
MKS P/N: FI20110
Rev: L, D/C: 1431
Specs: 208V, 3 Phase, 60A, 50/60Hz
Cert: CE, ETL Listed
Made: Assembled in USA
Application: Semiconductor Plasma, CVD, Etching, Surface Treatment
Function: 2.45GHz Microwave Plasma Generator
