Showing the single result
MKS ASTeX MicroWave SmartPower Generator
Brand: MKS ASTeX USA Model: MicroWave SmartPower MKS P/N: FI20110 Rev: L, D/C: 1431
Specs: 208V, 3 Phase, 60A, 50/60Hz Cert: CE, ETL Listed Made: Assembled in USA
Application: Semiconductor Plasma, CVD, Etching, Surface Treatment Function: 2.45GHz Microwave Plasma Generator
